[22a-A106-1~8] 12.6 Nanobiotechnology

[22a-A106-4] Preparation of Membrane Structures with TMAH for Nanopore DNA Sequencer

〇Taketo Aoshima¹, Genki Ohkatsu¹, Zhikai He¹, Ikuko Shimada¹, Yutaka Majima¹ (1.MSL,Tokyo Tech)

Keywords:nanopore DNA sequencing

Recently, DNA sequencers that directly read base sequences through nanopores have attracted much attention. We have been attempting to fabricate metallic nanopores on films by a combination of electron beam lithography, various dry etching methods, and electroless Au plating(ELGP) methods for DNA sequencing. I optimize the wet etching process using the TMAH water solution this time and report it because I tried manufacture of the membrane structure having a metal nanopore by a process simple and easy than before.