[22a-A202-1~9] 6.2 Carbon-based thin films

△ [22a-A202-3] Thermal decomposition prosses of highly-hydrogenated diamond-like carbon(DLC) films

〇Daisuke Niwa¹, Tomohiro Mishima¹, Koji Nakanishi¹, Kazuhiro Kanda¹, Masaya Takeuchi², Noki Fukumuro² (1.LASTI,Univ.Hyogo, 2.Eng.Univ.Hyogo)

Keywords:highly-hydrogenated diamond-like carbon films, Thermal decomposition

It is known that hydrogen desorption and other modifications of highly-hydrogenated DLC films occur as the temperature rises. In this study, thermal desorption spectroscopy (TDS) was performed to investigate the thermal decomposition process of highly-hydrogenated DLC films. As a result, molecular hydrogen and hydrocarbon peaks were observed around 360°C and 450°C. Therefore, it is considered that hydrogen desorption occurs at around 360°C and hydrocarbon desorption at around 450°C in highly-hydrogenated DLC films.