[22a-A202-1~9] 6.2 Carbon-based thin films

[22a-A202-4] Measurements of thermal annealed a-C:H films by positron annihilation spectroscopy

〇Setsuo Nakao¹, Atsushi Kinomura², Atsushi Yabuuchi², Kotaku Suzuki³ (1.AIST, 2.KURNS, 3.WERC)

Keywords:amorphous carbon films, thermal annealing, positron annihilation spectroscopy

In this study, a-C:H films are prepared and annealed post-deposition, and the structural changes are examined by positron annihilation spectroscopy.