Chemical state changes of Si-containing DLC film by the soft X-ray irradiation

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

Thu. Sep 22, 2022 9:00 AM - 11:30 AM A202 (A202)

Yasuharu Ohgoe(Tokyo Denki Univ.)

10:00 AM - 10:15 AM

〇(M1)Tomohiro Mishima¹, Koji Nakanishi¹, Masahito Niibe¹, Yuichi Haruyama¹, Kazuhiro Kanda¹ (1.LASTI, Univ. Hyogo)

Keywords:Diamond-like carbon