[22a-A202-1~9] 6.2 Carbon-based thin films

△ [22a-A202-6] Molecular Dynamics Simulation of Amorphous Carbon Growth on Sapphire Surface

〇QIANG YUE¹, TAISHI KANAYAMA¹, KOTA MATSUO¹, RYOMA NISHIKAWA¹, REKI NAKAMOTO¹, TAKAYOSHI YOKOYA², YUJI MURAOKA² (1.Okayama Univ., 2.RIIS-Okayama Univ.)

Keywords:amorphous carbon film, molecular dynamics simulation

Molecular dynamics simulation is useful for understanding the film formation process including the interface because it enables qualitative and quantitative analysis of thin film formation at the atomic level. At present, there is no example of molecular dynamics simulation related to carbon film formation on the surface of Al₂O₃ substrate, so the implementation is interesting. Therefore, in this study, we conducted a molecular dynamics simulation of the amorphous carbon film deposited on the Al₂O₃ substrate, and investigated the film formation process and the chemical bond state of the film-base interface.