[22a-A202-1~9] 6.2 Carbon-based thin films

[22a-A202-7] Relationship between film thickness and sp³ content in amorphous carbon films on sapphire substrates

〇Yuji Muraoka¹, Taishi Kanayama², Yue Qiang², Takanori Wakita¹, Takayoshi Yokoya¹ (1.Okayama Univ. RIIS, 2.Okayama Univ.)

Keywords:Amorphous carbon film, Film thickness dependence, Sapphire substrate

In this study, we investigated the film thickness dependence of the sp3 ratio in the amorphous carbon films on the sapphire substrates. As a result, it was found that the amount of sp3 in the films changed depending on the film thickness. The reason why the amount of sp3 in the amorphous carbon films decreases as the film thickness increases is considered to be the thermal relaxation of structure due to the carbon particles ablated during the film formation. We will discuss the details in presentation.