The 83rd JSAP Autumn Meeting 2022

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Oral presentation

CS Code-sharing session » 【CS.8】 Code-sharing Session of 6.5 & 7.6

[22a-A404-3~8] CS.8 Code-sharing Session of 6.5 & 7.6

Thu. Sep 22, 2022 10:00 AM - 11:30 AM A404 (A404)

Naoka Nagamura(NIMS)

11:00 AM - 11:15 AM

△ [22a-A404-7] Branching of oxidation at SiO2/Si(001) interface by Molecularly-adsorbed O2

〇(P)Yasutaka Tsuda1, Akitaka Yoshigoe1, Shuichi Ogawa2,3, Tetsuya Sakamoto1, Yuji Takakuwa1,4 (1.MSR, JAEA, 2.SRIS, Tohoku Univ., 3.IMRAM, Tohoku Univ., 4.mSIC, Tohoku Univ.)

Keywords:semiconductor, oxidation, Silicon