Development of a liquid detection sensor system based on capacitance change between electrodes

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 22, 2022 9:00 AM - 10:15 AM A406 (A406)

Yan Wu(Nihon Univ.)

9:30 AM - 9:45 AM

〇Yui Suzuki¹, Fuminobu Imaizumi¹ (1.NIT, Oyama)

Keywords:MEMS, sensor