[22a-A406-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [22a-A406-5] A Study on Electrical Characteristics of Self-Assembled Electrets for MEMS Vibration Energy Harvesters

〇(B)Ruichen Li¹, Reiki Sugimoto², Kosuke Kawashima², Yuya Tanaka³, Daisuke Yamane^1,2 (1.Ritsumeikan Univ., 2.GSSE, Ritsumeikan Univ., 3.GSST, Gunma Univ.)

Keywords:MEMS, Electret