The 83rd JSAP Autumn Meeting 2022

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[22a-C202-1~7] 6.4 Thin films and New materials

Thu. Sep 22, 2022 9:30 AM - 11:30 AM C202 (C202)

Daichi Oka(Tohoku Univ. )

11:15 AM - 11:30 AM

[22a-C202-7] Defect control at TixZn1-xO1+x /Si interface for tunnel FET by post annealing

〇(M2)Yuki Daimon1,2, Toyohiro Chikyow2, Astushi Ogura1,3, Takahiro Nagata2 (1.Meiji Univ., 2.NIMS, 3.MREL)

Keywords:tunnel FET, Combinatorial synthesis, forming gas annealing