6:00 PM - 6:15 PM
△ [22p-A105-18] Verification of Basic Properties of CMOS Gas Sensor for Biomimetic Odor Sensing
Keywords:potentiometric gas sensor arrays, E-nose, gas sensitive membrane
In this study, the mechanism of gas detection was examined based on an operational model of a CMOS potential gas sensor. The shift and change in slope of the characteristic line before and after gas adsorption were considered to detect changes in capacitance and potential in the sensing membrane. The shift of the characteristic line and the change of the slope caused by the change of the dielectric constant and the fixed charge density of the sensing membrane were caused by the gas exposure. The results revealed the basic characteristics of the potential sensor and a novel gas sensing device based on the gas-sensitive membrane.