[22p-A202-1~22] 6.2 Carbon-based thin films

[22p-A202-5] Pressure Dependence of Synthesis of Layered Carbon Nitride Films by Thermal CVD

〇Shigeki Takama¹, Hitoe Habuchi¹, Hayate Aoki¹, Tamio Iida¹ (1.Natl. Inst. Technol., Gifu Coll.)

Keywords:Carbon Nitride

Layered carbon nitride (CN) can be obtained by thermally condensing melamine or guanidine carbonate. CN film with a high layer orientation can be synthesized by thermal CVD. In this study, CN films were synthesized under various synthesis pressures with melamine as a source material. The half width of the diffraction peak (001) of X-ray diffraction decreased in elevating the pressure from 10 to 180 kPa. The higher pressure resulted in better crystallinity.