[22p-C202-1~12] 6.4 Thin films and New materials

△ [22p-C202-11] Dopant concentration dependence of electronic, optical, and magnetic properties of epitaxially grown Mn-doped ITO films

〇Saiki Kitagawa¹, Toshihiro Nakamura^1,2 (1.Graduate School of Human and Environmental studies, Kyoto Univ., 2.ILAS, Kyoto Univ.)

Keywords:diluted semiconductor, Indium tin oxide thin film, spintronics material

In this study, we focused on the epitaxially grown Mn-doped ITO film, which is a dilute magnetic semiconductor. This material is a substance in which a small amount of Mn is added to the ITO film. Mn-doped ITO film exhibits the low electrical resistivity, high optical transmittance in the visible region, and high-temperature ferromagnetism. In this study, the effect of the amount of Mn doping in epitaxially grown Mn-doped ITO films on electrical, optical, and magnetic properties was studied.