Bonding condition of surface activated bonding by gas cluster ion beam irradiation in acetic acid atmosphere

Presentation information

Oral presentation

CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.3 & 7.5

Thu. Sep 22, 2022 1:30 PM - 5:45 PM C205 (C205)

Hiroyuki Matsuzaki(University of Tokyo), Kousuke Moritani(兵庫県立大), Makiko Fujii(Yokohama National Univ.)

3:30 PM - 3:45 PM

〇Soichi Hanahara¹, Masaya Takeuchi¹, Noriaki Toyoda¹ (1.Univ Hyogo)

Keywords:gas cluster ion beam