[22p-C301-1~17] 3.6 Laser processing (formerly 3.7)

△ [22p-C301-15] Monitoring of periodic nanostructures on glass irradiated with femtosecond laser pulses by using anti-reflection property

〇(M2)Daisuke Nagai^1,2, Hideyuki Takada², Aiko Narazaki², Godai Miyaji¹ (1.Tokyo Univ. of A & T, 2.AIST)

Keywords:femtosecond laser, glass, nano periodic structure

We formed a periodic nanostructure on a synthetic quartz substrate surface irradiated with femtosecond laser pulses at different laser energy and scanning speed. We measured both of the reflectivity and transmittance of the nanostructured surface and observed its surface morphology with a scanning electron microscope. The results clearly show that the target surface having periodic nanostructures decreases the reflectivity as it increases the transmittance. That indicates the possibility of the in-process monitoring of the nanostructure formation with the femtosecond laser pulses.