[22p-P07-1~15] 6.3 Oxide electronics

[22p-P07-1] Preparation and characterization of VO₂ film by oxygen partial pressure control and residual carbon in the film

〇Tomonori Yamada¹, Masahiro Tahashi¹, Makoto Takahashi¹, Hideo Goto¹ (1.Chubu Univ.)

Keywords:vanadium oxide