[23a-A307-1~5] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[23a-A307-3] Optical Emission Spectroscopy in Pulse-Designed Deep Oscillation Magnetron Sputtering

〇Eisuke Yokoyama¹, Tomoki Nagai¹, Kaita Tsutsui¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

Keywords:pulsed sputtering, optical emission spectroscopy, deep oscillation magnetron sputtering

Deep oscillating magnetron sputtering (DOMS), which is performed using a comb-like pulsed power waveform, is a high-power pulsed magnetron sputtering with excellent arc-free characteristics for long pulses up to milliseconds. However, in the DOMS we have previously used, the amount of sputtered metal particle ions produced drops rapidly after the second-pulse discharge for the first-pulse discharge for micropulses. In this study, we investigated the maintenance of high ionization rate in the DOMS plasma by changing the On / Off time of the micropulses.