9:15 AM - 9:30 AM
△ [23a-C101-2] Fabrication and evaluation of BaSi2 films on Si3N4 insulators for thermoelectric applications
Keywords:BaSi2, Sputtering, thermoelectric applications
Oral presentation
13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices
Fri. Sep 23, 2022 9:00 AM - 12:15 PM C101 (C101)
Haruhiko Udono(Ibaraki Univ.), Hirokazu Tatsuoka(Shizuoka Univ.)
9:15 AM - 9:30 AM
Keywords:BaSi2, Sputtering, thermoelectric applications