The 83rd JSAP Autumn Meeting 2022

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[23a-C101-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

Fri. Sep 23, 2022 9:00 AM - 12:15 PM C101 (C101)

Haruhiko Udono(Ibaraki Univ.), Hirokazu Tatsuoka(Shizuoka Univ.)

9:45 AM - 10:00 AM

[23a-C101-4] Reduction of Cracks and Thick Film Deposition of BaSi2 by Vacuum Evaporation

〇Katsushi Nishino1, Shunnosuke Mori1, Sonoka Yamashita1, Kyoka U1 (1.Tokushima Univ.)

Keywords:BaSi2, vacuum evaporation