[23a-P03-1~4] 7 Beam Technology and Nanofabrication(Poster)

[23a-P03-1] Verification of metal ion formation using external evaporation source by electron cyclotron resonance ion source

〇Seitatsu Onosaka¹, Tsubasa Nakamura¹, Toyohisa Asaji² (1.NIT, Oshima College, 2.NIT, Niihama College)

Keywords:electron cyclotron resonance ion source

For industrial applications, this laboratory is conducting basic research on multi-charged ion production using an electron cyclotron resonance ion source, which can produce highly charged ions at a relatively low cost. In the previous research, the aluminum multi-charged ions have not been confirmed by experiments using a sputtering source. Because the amount of generated was little. In this study, we used an evaporation source that attached to chamber outside and verified the characteristics of the evaporation source in the generation of metallic ions.