[23a-P06-1~28] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23a-P06-11] Growth of In doped MgZnO Films by Mist CVD Method

〇Masaki Matsuda¹, Kotaro Ogawa², Yuichi Ota³, Tomohiro Yamaguchi¹, Kentaro Kaneko⁴, Shizuo Fujita⁴, Tohru Honda¹, Takeyoshi Onuma¹ (1.Kogakuin Univ., 2.ORC Manu., 3.TIRI, 4.Kyoto Univ.)

Keywords:MgZnO, Mist CVD, doping

Rocksalt-structured MgZnO alloys, which have ultra-wide bandgap, have attracted an attention because of being a candidate material for DUV and VUV emitter. To achieve n-type doping, In doped RS-MgZnO films were grown by mist CVD method.