[23a-P06-1~28] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23a-P06-17] Sputtering deposition of ZnO:Al Transparent Conducting Films on Solid-Phase Crystallized Seed Layers: Effects of Crystallization Temperature

〇Zhiyuan Shen¹, Hisato Yabuta², Naoto Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Kazunori Koga^1,3, Masaharu Shiratani¹, Naho Itagaki¹ (1.ISEE, Kyushu Univ., 2.CPNE, Kyushu Univ., 3.NINS.)

Keywords:solid phase crystallization, ZnO, ZnON