9:30 AM - 11:30 AM
[23a-P06-17] Sputtering deposition of ZnO:Al Transparent Conducting Films on Solid-Phase Crystallized Seed Layers: Effects of Crystallization Temperature
Keywords:solid phase crystallization, ZnO, ZnON
Poster presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)
Fri. Sep 23, 2022 9:30 AM - 11:30 AM P06 (Arena)
9:30 AM - 11:30 AM
Keywords:solid phase crystallization, ZnO, ZnON