The 83rd JSAP Autumn Meeting 2022

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Poster presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23a-P06-1~28] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

Fri. Sep 23, 2022 9:30 AM - 11:30 AM P06 (Arena)

9:30 AM - 11:30 AM

[23a-P06-26] Micro-Raman spectroscopy of bending stresses in β-Ga2O3(001) bulk wafer

〇Issei Maeda1, Sou Isaji1, Noriyuki Hasuike1, Toshiyuki Isshiki1, Kenji Kobayashi2 (1.Kyoto Inst. Tech., 2.Hitachi High-Tech)

Keywords:Raman spectroscopy, Ga2O3, stress