[23a-P06-1~28] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23a-P06-7] Room-temperature epitaxial growth of (ZnO)_x(InN)_1-x films by magnetron sputtering

〇Ryota Narishige¹, Naoto Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1.Kyushu Univ.)

Keywords:ZION, ZnO, sputtering