Study of Introduction of Post Metallization Annealing at the GeO2/Ge Interface

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo)

4:00 PM - 4:15 PM

〇Kugo Matsuura¹, Kota Kanno¹, Akari Kekke¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)

Keywords:semiconductor