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13 Semiconductors » 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo)

4:15 PM - 4:30 PM

[23p-C102-12] Preparation and evaluation of GeO₂ film by two-step oxidation

〇Hajime Saito¹, Yuta Tsuchiya¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)

Keywords:semiconductor