The 83rd JSAP Autumn Meeting 2022

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[23p-C102-1~14] 13.3 Insulator technology

Fri. Sep 23, 2022 1:15 PM - 5:00 PM C102 (C102)

Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo)

4:45 PM - 5:00 PM

[23p-C102-14] Investigation of Low Temperature Oxidation of Si Substrates Using Chemical Solutions

〇Hiroki Takahashi1, Gen Shimizu1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.TUAT)

Keywords:semiconductor