Kuniyuki Kakushima

→ Search for Kuniyuki Kakushima in Google Scholar

Chairperson, etc.

Thu. Mar 24, 2022 9:00 AM - 12:30 PM E103 (E103)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[24a-E103-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Kuniyuki Kakushima(Tokyo Tech), Tatsuya Okada(Univ. of the Ryukyus)