The 69th JSAP Spring Meeting 2022

Masanaga Fukasawa

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Chairperson, etc.

Fri. Mar 25, 2022 9:00 AM - 12:00 PM E104 (E104)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[25a-E104-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Masanaga Fukasawa(Sony Semiconductor Solutions), Masanobu Honda(Tokyo Electron Miyagi)