The 69th JSAP Spring Meeting 2022

Takafumi Ishida

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Chairperson, etc.

Sat. Mar 26, 2022 9:00 AM - 11:15 AM F308 (F308)

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.2 Applications and technologies of electron beams

[26a-F308-1~8] 7.2 Applications and technologies of electron beams

Mitsunori Kitta(AIST), Takafumi Ishida(Nagoya University)