Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Mar 24, 2022 9:00 AM - 12:30 PM E103 (E103)
Kuniyuki Kakushima(Tokyo Tech), Tatsuya Okada(Univ. of the Ryukyus)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
9:00 AM - 9:15 AM
〇Takeshi Hamamoto1, Kazushige Sato2, Sommawan Khumpuang2, Shiro Hara2 (1.MINIMAL, 2.AIST)
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9:15 AM - 9:30 AM
〇Masashi Kase1, Shuichi Noda1, Khumpuang Sommawan1,2, Hara Shiro1,2 (1.AIST, 2.MINIMAL)
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9:30 AM - 9:45 AM
〇Shuhei Nakamichi1, Hiroshige Kogayu1, Noriko Miura1, Hiroyuki Tanaka2, Fumito Imura2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MinimalFab, 2.AIST)
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9:45 AM - 10:00 AM
〇Hideyuki Watanabe1, Kazumasa Nemoto1, Fumito Imura1, Noriko Miura2, Takashi Yajima1, Shuichi Noda1, Hitoshi Umezawa1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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10:00 AM - 10:15 AM
〇Hiroyuki Tanaka1, Sang-Seok Lee2, Yoshiyuki Nozawa3, Toshihiro Hayami3, Sommawan Khumpuang1,4, Shiro Hara1,4 (1.AIST, 2.Tottori Univ., 3.SPPT, 4.MINIMAL)
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10:15 AM - 10:30 AM
〇Hiroshige Kogayu1, Hiroyuki Tanaka2, Fumito Imura2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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10:30 AM - 10:45 AM
〇Takashi Yajima1, Fumito Imura1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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11:00 AM - 11:15 AM
〇Fumito Imura1, Hiroyuki Tanaka1, Kouji Oosawa2, Takurou Kouno2, Kenzo Shodo2, Yasuo Terasawa2, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.AIST, 2.NIDEK, 3.MINIMAL)
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11:15 AM - 11:30 AM
〇Fumito Imura1, Hiroyuki Tanaka1, Kouji Oosawa2, Takurou Kouno2, Kenzo Shodo2, Yasuo Terasawa2, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.AIST, 2.NIDEK, 3.MINIMAL)
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11:30 AM - 11:45 AM
〇Kayo Kamasaki1, Shinji Iseki1, Fumito Imura2, Hiroyuki Tanaka2, Kouji Oosawa3, Takurou Kouno3, Kenzo Shodo3, Yasuo Terasawa3, Sommawan Khumpuang2,4, Shiro Hara2,4 (1.Kumamotobosei, 2.AIST, 3.NIDEK, 4.MINIMAL)
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11:45 AM - 12:00 PM
〇kazushige sato1,3, Takashi Chiba1,3, Masao Terada1,3, Kengo Hamada1,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp.)
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12:00 PM - 12:15 PM
〇Kazumasa Nemoto1, Takashi Yajima1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
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12:15 PM - 12:30 PM
〇Noriko Miura1,2, Masashi Kase3, Takeshi Aizawa2,4, Mitsunori Nogawa2, Yasuhiro Onishi2, Tatsuo Ishijima4, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.MINIMAL, 2.YONEKURA, 3.AIST, 4.KANAZAWA Uinv.)
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