Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Mar 25, 2022 9:00 AM - 12:00 PM E104 (E104)
Masanaga Fukasawa(Sony Semiconductor Solutions), Masanobu Honda(Tokyo Electron Miyagi)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
9:00 AM - 9:15 AM
〇Shota Nunomura1, Isao Sakata1 (1.AIST)
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9:15 AM - 9:30 AM
〇Takahiro Goya1, Tomohiro Kuyama1,2, Keiichiro Urabe1, Koji Eriguchi1 (1.Kyoto Univ., 2.JSPS Research Fellow)
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9:30 AM - 9:45 AM
〇Shintaro Toda1, Tatsuhiro Nozue1, Norio Kanzaki2, Kazutsune Miyanaga2, Masahiro Terashima3, Shin-ichi Iida3, Yasufumi Fujiwara2 (1.ULVAC Inc., 2.Osaka Univ., 3.ULVAC-PHI Inc.)
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9:45 AM - 10:00 AM
〇Rikyu Minami1, Shohei Nakamura1,2, Atsushi Tanide2, Kenji Ishikawa1, Takayoshi Tsutsumi1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ., 2.SCREEN Holdings Co., Ltd.)
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10:00 AM - 10:15 AM
〇Shohei Nakamura1,2, Atsushi Tanide1,2, Takahiro Kimura1, Soichi Nadahara1,2, Kenji Ishikawa2, Osamu Oda2, Masaru Hori2 (1.SCREEN Holdings Co., Ltd., 2.Nagoya Univ.)
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10:30 AM - 10:45 AM
〇(P)ErinJoy Capdos Tinacba1, Satoshi Hamaguchi1 (1.Osaka University)
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10:45 AM - 11:00 AM
〇Taito Yoshie1, Takayoshi Tsutsumi1, Kenji Ishikawa1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ.)
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11:00 AM - 11:15 AM
〇(M1)Yuto Seki1, Haruhito Kato1, Schuichi Kuboi1, Haruka Suzuki1,2, Hirotaka Toyoda1,2,3 (1.Nagoya Univ., 2.cLPS, Nagoya Univ., 3.NIFS)
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11:15 AM - 11:30 AM
〇Keita Ichikawa1, Haruka Suzuki1, Hirotaka Toyoda1,2 (1.Nagoya Univ., 2.NIFS)
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11:30 AM - 12:00 PM
〇Mitsuhiro Omura1, Junichi Hashimoto1, Takahiro Adachi1, Yusuke Kondo1, Masao Ishikawa1, Junko Abe1, Itsuko Sakai1, Hisataka Hayashi1, Makoto Sekine2, Masaru Hori2 (1.Kioxia, 2.Nagoya Univ.)
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