The 69th JSAP Spring Meeting 2022

Session information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[25p-E104-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Mar 25, 2022 1:00 PM - 6:30 PM E104 (E104)

Akihisa Ogino(Shizuoka Univ.), Toru Harigai(Toyohashi Univ. of Tech.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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