Toru Harigai

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Chairperson, etc.

Fri. Mar 25, 2022 1:00 PM - 6:30 PM E104 (E104)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[25p-E104-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Akihisa Ogino(Shizuoka Univ.), Toru Harigai(Toyohashi Univ. of Tech.)