Oral presentation

[26p-F308-1~4] 7.3 Micro/Nano patterning and fabrication

Sat. Mar 26, 2022 1:00 PM - 2:00 PM F308 (F308)

Jun Taniguchi(Tokyo Univ. of Sci.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

1:00 PM - 1:15 PM

[26p-F308-1] Improvement of Resist Patterns Projected by the Parabolic Mirror System Using the One-sided Illumination

〇Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)

1:15 PM - 1:30 PM

Ryusei Nagahama¹, 〇Hiroaki Kawata¹, Akio Mizutani¹, Hisao Kikuta¹, Yoshihiko Hirai¹ (1.Osaka Pref, Univ.)

1:30 PM - 1:45 PM

Ryuhei Yamamura¹, Yusei Kunitou¹, Kai Kameyama¹, Masaaki Yasuda¹, 〇Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)

1:45 PM - 2:00 PM

〇(M1)Yuto Maeda¹, Naho Kaneko¹, Tomoaki Oga¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.KISTEC)