[22p-E105-1~18] 8.1 Plasma production and diagnostics

△ [22p-E105-8] Diagnostics of vibrational and rotational temperature of OH radical of argon-oxygen low pressure inductively coupled plasma

〇Yuya Yamashita¹, Shuichi Date¹, Hidehiko Yamaoka¹, Takuya Akiba¹, Takayuki Shibuya¹, Toshihide Iwanaga¹, Hiroshi Akatsuka² (1.TIRI, 2.Tokyo Tech)

Keywords:optical emission spectroscopic measurement, processing plasma, spectral radiance calibration

The dependence of the vibration temperature T_vib and rotation temperature T_rot of the OH radical of the argon-oxygen (Ar-O₂) low pressure inductively coupled plasma generated by the etching unit were diagnosed by optical emission spectroscopic (OES) measurement of A²Σ⁺→X²Π transitions. By using an integrating sphere light source as the spectral radiance standard, the quantization error in the spectral radiance calibration of the photometric system was reduced, and OES measurement in the ultraviolet region was enabled. In the range of O₂ partial pressure 0 - 3.23 %, T_vib was increased from 0.12 to 0.39 eV. On the other hand, T_rot was almost constant at 0.030 - 0.035 eV.