The 69th JSAP Spring Meeting 2022

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CS Code-sharing session » 【CS.9】 Code-sharing Session of 13.7 & 15.6

[22p-E302-1~15] CS.9 Code-sharing Session of 13.7 & 15.6

Tue. Mar 22, 2022 1:45 PM - 6:30 PM E302 (E302)

Yasunori Tanaka(AIST), Manabu Arai(Nagoya Univ.)

5:45 PM - 6:00 PM

[22p-E302-13] High Mobility 3C-SiC n-MOSFET and Demonstration of High Temperature Operation

〇Keisuke Yamamoto1, Wang Dong1, Hiroshi Nakashima1, Shigeomi Hishiki2, Hiroki Uratani2, Yoshiki Sakaida2, Keisuke Kawamura2 (1.Kyushu Univ., 2.AIR WATER INC.)

Keywords:3C-SiC, MOSFET, gate stack