[22p-F308-1~13] 2.1 Detection Devices

[22p-F308-9] Development of X-ray imaging detector system with high-spatial-resolution and large field of view

〇Takashi Kameshima^1,2, Takaki Hatsui^2,1 (1.JASRI, 2.RIKEN)

Keywords:X-ray, scintillator, indirect

We develop an X-ray imaging detector equipped with a 150 Mpixels CMOS image sensor, a large image circle microscopic optics, and a thin-film scintillator. A prototype with a field of view of 15.2 x 11.4 mm² have successfully visualized 1.2 um line & space patterns. The resulting spatial resolution is close to the diffraction-limited performance of 1.0 um line & space.