[22p-P05-1~4] 13.2 Exploratory Materials, Physical Properties, Devices

[22p-P05-4] High precision evaluation of carrier mobility in high resistive materials using ionic liquids.

〇(M1)Tsuyoshi Shibasaki¹, Takumi Kimura¹, Yasuhiro Yamada¹, Kenichi Oto¹ (1.Chiba Univ.)

Keywords:semiconductor, mobility, ionic liquids

We have studied the carrier transport using ionic liquids gate and the van der Pauw four-terminal measurement to evaluate the mobility of high resistive materials with high accuracy. From the equivalent circuit model of the sample, the carrier density induced by the applied gate voltage was estimated precisely. The results of the comparison between the conventional two-terminal method and the present four-terminal method will be reported in terms of the mobility obtained from the gate voltage dependence of the electrical conductivity at room temperature.