[23a-D214-1~7] 11.4 Analog applications and their related technologies

[23a-D214-6] Control of physical properties of YBCO thin film with helium ion microscopy (2)

〇Tetsuro Misawa¹, Riku Inoue^1,3, Shigeyuki Ishida¹, Shinichi Ogawa¹, Yukinori Morita¹, Hiroshi Eisaki¹, Shin-ichi Uchida^1,2, Taichiro Nishio³, Chiharu Urano¹ (1.AIST, 2.Univ. of Tokyo, 3.Tokyo Univ. Science)

Keywords:high temperature superconductivity, Josephson junction, helium ion microscopy

In the fabrication of copper oxide high-T_c superconductor Josephson junctions, it is a challenge to make a high-quality tunnel barrier layer with a thickness of several nm. Recently, a novel method to fabricate Josephson junctions by locally controlling the superconducting properties of copper oxide high-T_c superconductor thin films using sub-nanometer diameter focused helium ion beam irradiation with helium ion microscopy (HIM) technique has been proposed. In this report, we aim to clarify the relationship between the irradiation conditions of the focused helium ion beam and the YBCO junction properties.