The 69th JSAP Spring Meeting 2022

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17 Nanocarbon Technology » 17.3 Layered materials

[23a-E101-1~11] 17.3 Layered materials

Wed. Mar 23, 2022 9:00 AM - 12:00 PM E101 (E101)

Akinobu Kanda(Univ. of Tsukuba)

9:30 AM - 9:45 AM

[23a-E101-3] Aluminum-scandium alloy for S/D contacts to fabricate WSe2 nFET

〇Ryosuke Kajikawa1, Takamasa Kawanago2, Kuniyuki Kakushima1, Hitoshi Wakabayashi1 (1.Tokyo Tech, 2.Tokyo Tech FIRST)

Keywords:TMDC, WSe2, Aluminum-scandium alloy