[23p-D113-1~19] 1.6 Ultrasonics

△ [23p-D113-18] Propagation and Resonance Properties of Longitudinal Leaky SAW on Bonded Structures Consisting of Similar and Dissimilar Materials

〇(M1)Yudai Fujii¹, Masashi Suzuki¹, Shyoji Kakio¹ (1.Yamanashi Univ.)

Keywords:Quartz, LiTaO3, Bonded Structures Consisting of Dissimilar Materials

We theoretically analyzed the propagation and resonance properties of longitudinal leaky SAW on the structure of LiTaO₃(LT) thin plate bonded on the Quartz similar material bonded structure. The propagation properties showed low attenuation at relatively thick LT normalized thickness, and the K² was found to be about 8 times higher than that of the Quartz similar material bonded structure. In terms of resonance properties, the displacement was concentrated in the middle layer of the bonded structure, and the leakage component into the substrate was reduced, resulting in a wider bandwidth.