[23p-D214-1~19] 11.5 Junction and circuit fabrication process, digital applications

[23p-D214-7] Development of a fabrication process for superconducting integration circuits based on nitride superconductors for qubit control

〇Shigeyuki Miyajima¹, Taro Yamashita², Masamitsu Tanaka², Naoki Takeuchi³, Hirotaka Terai¹ (1.NICT, 2.Nagoya Univ., 3.AIST)

Keywords:superconductor, Josephson junction, NbN