[23p-E204-1~13] 6.3 Oxide electronics

[23p-E204-12] Synthesis of Ilmenite-type MgTiO₃ Thin Films by Pulsed-Laser Deposition

〇Masamichi Negishi¹, Kohei Fujiwara¹, Atsushi Tsukazaki^1,2,3 (1.IMR, Tohoku Univ., 2.CSRN, Tohoku Univ., 3.CSIS, Tohoku Univ.)

Keywords:thin film, oxide, band gap

To improve qualities of MgTiO₃ thin films, we optimized conditions for synthesis of the films by pulsed-laser deposition method. We will talk about suppression of crystal twining achieved by the optimization, and evaluation of absorption spectrum of the obtained samples for ultra-violet and visible light.