The 69th JSAP Spring Meeting 2022

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Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[23p-E307-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Wed. Mar 23, 2022 1:30 PM - 7:00 PM E307 (E307)

Kazuhiko Endo(AIST), Masahiro Hori(静大)

1:30 PM - 1:45 PM

[23p-E307-1] The 13th Silicon Technology Division Paper Award・Young Resercher Award Ceremony

〇Kazuhiko Endo1,2 (1.Silicon Technology Division, 2.AIST)

Keywords:Silicon Technology