1:45 PM - 2:15 PM
[23p-E307-2] [The 13th Silicon Technology Division Paper Award] Low-power and ppm-level multi molecule detection by integrated self-heated metal nanosheets
Keywords:metal nanosheet, gas sensor, self-heating
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Wed. Mar 23, 2022 1:30 PM - 7:00 PM E307 (E307)
Kazuhiko Endo(AIST), Masahiro Hori(静大)
1:45 PM - 2:15 PM
Keywords:metal nanosheet, gas sensor, self-heating