6:00 PM - 6:15 PM
△ [23p-E307-17] Development of MOS Capacitance Evaluation Method at Cryogenic Temperature (4K)
Keywords:Cryo-CMOS, Carrier Freezeout, MOS Capacitance
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Wed. Mar 23, 2022 1:30 PM - 7:00 PM E307 (E307)
Kazuhiko Endo(AIST), Masahiro Hori(静大)
6:00 PM - 6:15 PM
Keywords:Cryo-CMOS, Carrier Freezeout, MOS Capacitance