[The 13th Silicon Technology Division Paper Award] Low-power and ppm-level multi molecule detection by integrated self-heated metal nanosheets

Takahisa Tanaka, Kenta Tabuchi, Kohei Tatehora, Yosuke Shiiki, Shuya Nakagawa, Tsunaki Takahashi, Ryota Shimizu, Hiroki Ishikuro, Tadahiro Kuroda, Takeshi Yanagia, Ken Uchida

Presentation information

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[23p-E307-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Wed. Mar 23, 2022 1:30 PM - 7:00 PM E307 (E307)

Kazuhiko Endo(AIST), Masahiro Hori(静大)

1:45 PM - 2:15 PM

[23p-E307-2] [The 13th Silicon Technology Division Paper Award] Low-power and ppm-level multi molecule detection by integrated self-heated metal nanosheets

〇Takahisa Tanaka¹, Kenta Tabuchi², Kohei Tatehora², Yosuke Shiiki², Shuya Nakagawa², Tsunaki Takahashi¹, Ryota Shimizu², Hiroki Ishikuro², Tadahiro Kuroda¹, Takeshi Yanagia¹, Ken Uchida¹ (1.The Univ. of Tokyo, 2.Keio Univ.)

Keywords:metal nanosheet, gas sensor, self-heating