The 69th JSAP Spring Meeting 2022

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13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[23p-F308-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

Wed. Mar 23, 2022 1:15 PM - 5:00 PM F308 (F308)

Hirokazu Tatsuoka(Shizuoka Univ.), Kenji Yamaguchi(QST)

1:15 PM - 1:30 PM

[23p-F308-1] Improving the machine learning prediction of the composition ratio of BaSi2 thin films deposited by vacuum evaporation

〇Ryuto Ueda1, Keisuke Arimoto1, Junji Yamanaka2, Kosuke Hara1 (1.CCST, Univ. of Yamanashi, 2.CIA, Univ. of Yamanashi)

Keywords:BaSi2, vacuum vapor deposition, kernel ridge regression